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Grazing-incidence X-Ray Analysis of Surfaces and Thin Films

Published online by Cambridge University Press:  06 March 2019

T. C. Huang
T. C. Huang*
Affiliation:
IBM Research Division, Almaden Research Center 650 Harry Road, San Jose, CA 95120-6099
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Abstract

Grazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 143 - 150
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

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