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9 - Science and Technology of Integrated Multifunctional Piezoelectric Oxides/Ultrananocrystalline Diamond (UNCD™) Films for a New Generation of Biomedical MEMS Energy Generation, Drug Delivery, and Sensor Devices

Published online by Cambridge University Press:  08 July 2022

By
Orlando Auciello  and
Geunhee Lee
Edited by
Orlando Auciello
Orlando Auciello
Affiliation:
University of Texas, Dallas
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Summary

This chapter focus on describing the science and technology related to the use of UNCD films for fabricating MEMS and NEMS structures suitable for use in various devices for medical applications. Topics discussed include: 1) description of the materials science involved in the integration of UNCD films with dissimilar materials in film form, such as piezoelectric oxides, for development of piezo-actuated UNCD-based MEMS/NEMS, and integration with metal films for contacts, and biological matter (e.g., heart cells) for cell bit-induced mechanical deformation of piezo/UNCD cantilevers to generate power via the converse piezoelectric effect, whereby mechanical deformationof cantilevers is transduced into power generation, via mechanical displacement in opposite directions of + and - ions in the piezoelectric layer, thus voltage generation between two electrode layers sandwiching the piezoelectric layer for a new generation of biomedicalenergy generation devices and biosensors). Piezoelectric/UNCD integrated films-based MEMS/NEMS power generation device can power a new generation of defibrillator/pacemaker, eliminating relatively short live batteries in current devices.

Keywords

piezoelectricoxidefilmsUNCD filmsintegratedMEMS/NEMSbiosensordrug deliveryenergy generationsystems
Type
Chapter
Information
Ultrananocrystalline Diamond Coatings for Next-Generation High-Tech and Medical Devices , pp. 237 - 262
Publisher: Cambridge University Press
Print publication year: 2022

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