1 results
Characterization of the interfacial strength of SiNx/GaAs film/substrate systems using energy balance in nanoindentation
-
- Journal:
- Journal of Materials Research / Volume 28 / Issue 22 / 28 November 2013
- Published online by Cambridge University Press:
- 11 November 2013, pp. 3137-3145
- Print publication:
- 28 November 2013
-
- Article
- Export citation