An ion source for generation of low-charged heavy ions has been
developed using low-power KrF excimer and frequency-doubled Nd:YAG
lasers. The ion source was examined with two experimental modes of
low-voltage DC extraction at ∼20 kV and high-voltage pulse
extraction at 150 kV. Normalized emittance of extracted beams composed
of Cu+ and Cu2+ ions was measured to be about
0.05 and 0.8 πmm-mrad for the DC extraction and the pulse
extraction, respectively. Electron temperature was observed by means of
a single probe method to be 0.8 to 2.5 eV, depending on the intensity
of the KrF laser.
