This paper presents the first experimental results of a novel MEMS-based waveguide filter for mobile back-hauling at K-band with adjustable center frequency. The tuning concept employs commercial packaged RF MEMS switches, wire-bonded within a rectangular cavity. The switches are used to perturb the current distribution of the TE101 mode so as to tune the resonant frequency of the cavity. A tuning range up to 2% with unloaded Qs of the order of 1000 in K-band can be obtained. A second-order filter prototype employing commercially available MEMS on silicon substrate has been tested. Measurements show a 160 MHz frequency shift (0.7%) and Qs up to 1000 using only one MEMS per resonator. New higher-order prototypes using low-loss substrate MEMS (e.g. quartz) will be fabricated in order to get higher Qs. The concept here present leads to a very simple structure. The number of MEMS per resonator is, in fact, minimized (we use only one MEMS) and the design is simple. On the other hand, the achievable tuning range is lower (<2%) than the other concepts. Higher tuning ranges are achievable using more MEMS, but at the expense of lower Qs of the resonators.

This paper presents the modeling, manufacturing, and testing of a micro-electromechanical system (MEMS)-based LC tank resonator suitable for low phase-noise voltage-controlled oscillators (VCOs). The device is based on a variable MEMS varactor in series with an inductive coplanar waveguide line. Two additional parallel stubs controlled by two ohmic MEMS switches have been introduced in order to increase the resonator tunability. The device was fabricated using the FBK-irst MEMS process on high resistivity (HR) silicon substrate. Samples were manufactured with and without a 0-level quartz cap. The radio frequency characterization of the devices without 0-level cap has shown a continuous tuning range of 11.7% and a quality factor in the range of 33–38. The repeatability was also tested on four samples and the continuous tuning is 11.7 ± 2%. Experimental results on the device with a 0-level cap, show a frequency downshift of about 200 MHz and a degradation of the quality factor of about 20%. This is, most likely, due to the polymeric sealing ring as well as to a contamination of the ohmic contacts introduced by the capping procedure. A preliminary design of a MEMS-based VCO was performed using Advanced Design System and a hardwired prototype was fabricated on Surface Mount Technology on RO4350 laminate. The prototype was tested resulting in a resonance frequency of 5 GHz with a phase noise of −105 and −126 dBc at 100 KHz and 1 MHz, respectively, and a measured output power of −1 dBm.

The development in high-end microwave transceiver systems toward the software defined radio has brought about the need for tunable frontend filters. Although the problem is being tackled by the microwave community, there still appears to be an unmet demand for practical tunable filter technologies. With this motivation, this work presents a tuning method that delivers a resonator Q0 of 2000–3621 within a minimum tuning ratio of 1:1.42. A continuously tunable notch filter based on this tuning method is presented. The design is manufactured, measured, and verified. It is shown that the tuning technology compares favorably to other selected technologies.