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Surface imaging by an ion probe scanning

Published online by Cambridge University Press:  15 August 2000

K. Wang ,
P. Garoche  and
L. Dumoulin
K. Wang*
Affiliation:
Laboratoire de Physique des Solides, Université de Paris-Sud, CNRS, 91405 Orsay Cedex, France
P. Garoche
Affiliation:
Laboratoire de Physique des Solides, Université de Paris-Sud, CNRS, 91405 Orsay Cedex, France
L. Dumoulin
Affiliation:
CSNSM, 91405 Orsay Cedex, France
*
[email protected]
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Abstract

We describe the realization of an ultrahigh vacuum scanning ion beam apparatus. The ion gun is based on the principle of field emission from a liquid gallium film wetting a sharp needle. The beam can be focused to a probe spot with a diameter less than 40 nm. The gun is fixed to an ultrahigh vacuum chamber, and is driven by a digital scanning device that works at variable frequency. The video image is built from the outgoing electrons resulting from the ion beam impacts. We describe the setup and discuss the relation between the ion probe current and the scanning speed. Specific applications to surface imaging are presented.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 11 , Issue 2 , August 2000 , pp. 147 - 151
Copyright
© EDP Sciences, 2000

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