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Calibration of a 2 dimensional hydrogenated amorphous silicon thin film position sensitive detector (2D a-Si:H TFPSD)

Published online by Cambridge University Press:  03 October 2003

K. Gnanvo  and
Z. Y. Wu
K. Gnanvo*
Affiliation:
Département d'Optique, École Nationale Supérieure de Télécommunications de Bretagne, BP 832, 29285 Brest Cedex, France
Z. Y. Wu
Affiliation:
Département d'Optique, École Nationale Supérieure de Télécommunications de Bretagne, BP 832, 29285 Brest Cedex, France
*
[email protected]
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Abstract

It is well known that for a 2 dimensional hydrogenatedamorphous silicon thin film position sensitive detector (a-Si:HTFPSD), the calculated coordinates of the position, from thecurrents measured on the PSD, do not represent the real spotposition. The errors result from the generally usedposition-current expression, and also from device fabricationdefects such as the inhomogeneity of TCO thickness and theelectrode contact resistance. The best way to correct the errorsis to calibrate the device. In this paper, we present acalibration method developed earlier for a smart pressure sensor to calibrate a 2D tetralateral a-Si:H TFPSD.The calibration algorithm is presented. Experimental results areshown and the calibration error is discussed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 24 , Issue 3 , December 2003 , pp. 231 - 239
Copyright
© EDP Sciences, 2003

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References

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