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Back-illuminated CCD for coherent soft X-ray imaging

Published online by Cambridge University Press:  28 March 2008

G. Beutier ,
G. van der Laan ,
A. Marty  and
F. Livet
G. Beutier
Affiliation:
SP2M, CEA Grenoble, 17 avenue des Martyrs, 38054 Grenoble Cedex, France
G. van der Laan
Affiliation:
Magnetic Spectroscopy Group, Daresbury Laboratory, Warrington WA4 4AD, UK Diamond Light Source Ltd, Chilton, Didcot OX11 0DE, UK
A. Marty
Affiliation:
SP2M, CEA Grenoble, 17 avenue des Martyrs, 38054 Grenoble Cedex, France
F. Livet*
Affiliation:
SIMaP, INPG-UJF, UMR CNRS 5266, BP 75, 38402 Saint Martin d'Hères, France
*
[email protected]
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Abstract

Direct-illumination CCDs find increasing use in coherent X-ray imaging due to their good spatial resolution and signal-to-noise ratio. These CCDs offer a high quantum efficiency for soft X-rays near the 3d transition metal L edges. We compare front- and back-illuminated CCDs and describe a method to obtain images with a large dynamic range (five orders of magnitude) and high spatial resolution. Back-illuminated CCDs are resistant to radiation damage at the soft X-ray energies and provide a true 13.5 μm pixel resolution. High quality diffraction images are obtained in magnetic studies from metallic multilayer structures in reflection geometry.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 42 , Issue 2 , May 2008 , pp. 161 - 167
Copyright
© EDP Sciences, 2008

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