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Influence of nitrogen impurities on the formation of active species in Ar-O2 plasmas

Published online by Cambridge University Press:  28 October 2011

V. Guerra ,
K. Kutasi ,
P.A. Sá  and
M. Lino da Silva
V. Guerra*
Affiliation:
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, 1049-001 Lisboa, Portugal Departamento de Fsica, IST, Universidade Técnica de Lisboa, Portugal
K. Kutasi
Affiliation:
Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, P.O. Box 49, 1525 Budapest, Hungary
P.A. Sá
Affiliation:
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, 1049-001 Lisboa, Portugal Departamento de Engenharia Fsica, Faculdade de Engenharia da Universidade do Porto, 4200-465 Porto, Portugal
M. Lino da Silva
Affiliation:
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, 1049-001 Lisboa, Portugal
*
ae-mail: [email protected]
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Abstract

A self-consistent kinetic model was developed in order to study the production of active species in Ar-O2 surface-wave microwave plasmas with a relatively small N2 addition. It is shown that the Ar-O2-N2 mixture produces efficiently the same active species as an Ar-O2 discharge, including oxygen atoms, metastable O2(a1∆g) molecules and the VUV emitting Ar(4s) states. Furthermore, active N-containing species are additionally produced, in particular N atoms and NO ground-state and excited molecules, which makes the ternary mixture very interesting for numerous plasma applications.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 56 , Issue 2: Topical Issue: 18th International Colloquium on Plasma Processes (CIP 2011) , November 2011 , 24004
Copyright
© EDP Sciences, 2011

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