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Mobile microrobots

Published online by Cambridge University Press:  09 March 2009

Isao Shimoyama ,
Takashi Yasuda ,
Hirofumi Miura ,
Yayoi Kubo Fujisawa  and
Yuichi Ezura
Isao Shimoyama
Affiliation:
Department of Mechano Informatics, The University of Tokyo, 7–3–1 Hongo, Bunkyo–kuTokyo 113 (Japan)
Takashi Yasuda
Affiliation:
Department of Mechano Informatics, The University of Tokyo, 7–3–1 Hongo, Bunkyo–kuTokyo 113 (Japan)
Hirofumi Miura
Affiliation:
Department of Mechano Informatics, The University of Tokyo, 7–3–1 Hongo, Bunkyo–kuTokyo 113 (Japan)
Yayoi Kubo Fujisawa
Affiliation:
Department of Mechano Informatics, The University of Tokyo, 7–3–1 Hongo, Bunkyo–kuTokyo 113 (Japan)
Yuichi Ezura
Affiliation:
Department of Mechano Informatics, The University of Tokyo, 7–3–1 Hongo, Bunkyo–kuTokyo 113 (Japan)
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Summary

This paper discusses suitable mechanisms and functions of a mobile microrobot from the point of view ofscale effects. Several assumptions are made using animalscaling. A large scale model is shown to demonstrate these mechanisms. Moreover, microsized models have been built on silicon wafers by using polysilicon as rigidplates and polyimide as elastic joints. The results showthat suitable mechanisms and functions may be different from those of a conventional robot.

Keywords

Mobile microrobotsScale effectsSilicon wafersMicrosized moduleInsects
Type
Article
Information
Robotica , Volume 14 , Issue 5 , September 1996 , pp. 469 - 476
Copyright
Copyright © Cambridge University Press 1996

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References

1. Fan, L., Tai, Y. and Muller, R.S., “Integrated MovableMicromechanical Structures for Sensors and Actuator“ IEEE Transactions on Electron Devices 35(6), 724 (1988).CrossRefGoogle Scholar
2. Mehregany, M.,. Gabriel, K.J. and Trimmer, W.S.N.,“Integrated Fabrication of Polysilicon Mechanisms“ IEEE Transactions on Electron Devices 35(6), 719 (1988).CrossRefGoogle Scholar
3. Brennen, R.A., Pisano, A.P. and Tang, W.C., “MultipleMode Micromechanical Resonators“ Proceedings of MEMS'90 (1990) p. 9 et seq.Google Scholar
4. Kim, C., Pisano, A.P., Muller, R.S. and Lim, M.G., “Polysilicon Microgripper“ Proceedings of IEEE Workshopon Solid-state Sensor and Actuator (1990) p. 48 et seq.CrossRefGoogle Scholar
5. Mehregany, M., P., Nagarkar, S.D., Senturia and J.H., Lang,“Operation of Microfabricated Harmonic and OrdinarySide-drive Motors“ Proceedings of MEMS'90 (1990) p. 1 et seq.Google Scholar
6. Tai, Y., L., Fan and R.S., Muller, “IC-processedMicro-motors: Design, Technology, and Testing“ Proceedings of MEMS'89 (1989) p. 1 et seq.Google Scholar
7. Tang, W.C., T.H, Nguyen and R.T., Howe, “LaterallyDriven Polysilicon Resonant Microstructures“ Sensors andActuators 20, 25 (1989).CrossRefGoogle Scholar
8. Schmidt-Nielsen, K., Scaling—Why is animal size soimportant? (Cambridge University Press, Cambridge, UK, 1984).Google Scholar
9. Pedley, T.J., Scale Effects in Animal Locomotion (Academic Press, New York, 1977).Google Scholar
10. McMahon, T.A. and J.T., Bonner, On Size and Life(Scientific American Books, 1983).Google Scholar
11. Smith, J.M., Mathematical Ideas in Biology (Cambridge University Press, Cambridge, UK, 1968).CrossRefGoogle Scholar
12. Chapman, R.F., The Insects—Structure and Function (Harvard University Press, Boston, 1982).Google Scholar
13. R., Mahadevan, “Analytical Modelling of Electrostatic Structures“ Proceedings of MEMS'90 (1990) p. 120 et seq.Google Scholar
14. Wagner, B. and W., Benecke, “Micrdfabricated Actuator with Moving Permanent Magnet“ Proceedings of MEMS' 91 (1991) p. 27 et seq.Google Scholar
15. Suzuki, K., I., Shimoyama and H., Miura, “Insect-Model (1985).Based Microrobot with Elastic Hinges“ electromechanical Systems 3(1), 4 (1994).CrossRefGoogle Scholar
16. Benecke, W., L., Csepregi, A., Heuberger, K., Kuhl and H., Seidel, “A Frequency-selective, Piezoresistive SiliconVibration Sensor“ Technical Digest of Transducers '85, 105(1985).Google Scholar