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Group work of distributed microactuators

Published online by Cambridge University Press:  09 March 2009

Hiroyuki Fujita ,
Manabu Ataka  and
Satoshi Konishi
Hiroyuki Fujita
Affiliation:
Institute of Industrial Science, The University of Tokyo, 7–22–1 Roppongi, Minato–ku, Tokyo 106 (Japan) fujita 88s. u–tokyo. ac.jp
Manabu Ataka
Affiliation:
Institute of Industrial Science, The University of Tokyo, 7–22–1 Roppongi, Minato–ku, Tokyo 106 (Japan) fujita 88s. u–tokyo. ac.jp
Satoshi Konishi
Affiliation:
Institute of Industrial Science, The University of Tokyo, 7–22–1 Roppongi, Minato–ku, Tokyo 106 (Japan) fujita 88s. u–tokyo. ac.jp
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Summary

This paper proposes and demonstrates a method toobtain macroscopic work out of distributed microactuatorsfabricated by IC-compatible micromachiningprocesses. We have coordinated the simple and smallmotion of microactuators in order to perform a task. Theconcept and a control scheme are discussed first. In orderto show the feasibility, the fabrication and operation ofarrayed microactuators for conveyors are described. One uses thermally driven cantilevers and the other uses controlled air flow from micronozzles to carry flat objects.

Keywords

Distributed microactuatorsGroup workMicromachiningCantileversMicronozzles.
Type
Article
Information
Robotica , Volume 14 , Issue 5 , September 1996 , pp. 487 - 492
Copyright
Copyright © Cambridge University Press 1996

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