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An XYZ Micromanipulator with three translational degrees of freedom

Published online by Cambridge University Press:  21 February 2006

Kimberly A. Jensen ,
Craig P. Lusk  and
Larry L. Howell
Kimberly A. Jensen
Affiliation:
Department of Mechanical Engineering, Brigham Young University, Provo, UT 84602 (USA)
Craig P. Lusk
Affiliation:
Department of Mechanical Engineering, Brigham Young University, Provo, UT 84602 (USA)
Larry L. Howell
Affiliation:
Department of Mechanical Engineering, Brigham Young University, Provo, UT 84602 (USA)
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Abstract

This paper introduces a three degree of freedom XYZ Micromanipulator (XYZM) that is fabricated in the $x$-$y$ plane and positions components in the $x$, $y$, and $z$ directions using three independent linear inputs. The mechanism positions components on a platform using three legs, each composed of a slider mechanism and a parallelogram mechanism.

Three versions of the XYZM were fabricated and tested using surface micromachining processes: the rigid-body, offset, and compliant XYZM. Slider displacements of 45 micrometers result in a predicted out-of-plane displacement of 188 micrometers for the rigid-body XYZM, 205 micrometers for the offset XYZM, and 262 micrometers for the compliant XYZM.

Keywords

XYZ MicromanipulatorThree inputsTranslational DOFs
Type
Article
Information
Robotica , Volume 24 , Issue 3 , May 2006 , pp. 305 - 314
Copyright
2006 Cambridge University Press

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