Published online by Cambridge University Press: 09 March 2009
A bending and expanding motion actuator which iscomposed of multi-layered PZT unimorph cells has beendeveloped. These cells are piled one against another.Each cell's electrode is divided into three sectors and thefacing sectors are connected to one another. Multidirectionalbending is realized by controlling the drivingvoltage of each sector. The actuator is 12 mm indiameter, 20 mm in length and 6.4 g in weight with 40cells. The bending angle was 2.2 degrees, and the expansion displacement was 700 μm with 150 V. The resonant frequency was 95 Hz at 25 V.