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Towards fast reciprocal space mapping

Published online by Cambridge University Press:  01 March 2012

J. F. Woitok*
Affiliation:
PANalytical B.V., P.O. Box 13, 7600 AA Almelo, The Netherlands
A. Kharchenko
Affiliation:
PANalytical B.V., P.O. Box 13, 7600 AA Almelo, The Netherlands
*
a)Electronic mail: [email protected]

Abstract

A commercially available solid-state multiple strip detector was successfully used to perform reciprocal space mapping and to significantly reduce the data collection time as compared to conventional setups. The quality of the data benefits from the detector’s unique properties such as a high local linearity range and high dynamic range. This paper describes maps of symmetrical and asymmetrical reflections taken on different kinds of samples. A quasiperfect AlGaAs∕GaAs Multiquantum Well Structures (MQW) was used to evaluate details about the instrumental function. The main application of the proposed setup is for less perfect materials similar to GaN-based structures. A study of the thermal stability of a metal-organic chemical-vapor deposition grown InGaN∕GaN MQW by means of in situ temperature-dependent reciprocal space mapping demonstrates the possibilities of the new setup.

Type
XRD Instrumentation and Techniques
Copyright
Copyright © Cambridge University Press 2005

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