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Bragg-Brentano and Seeman-Bohlin Diffractometers for Thin Films

Published online by Cambridge University Press:  10 January 2013

L. S. Zevin
Affiliation:
Materials Engineering Department and Institutes for Applied Research, Ben-Gurion University of the Negev, P.O. Box 1025, Beer-Sheva, 84110, Israel

Abstract

The performances of Seeman-Bohlin (S-B) and Bragg-Brentano (B-B) diffractometers with flat thin film samples were compared on the basis of equal instrumental aberrations. It was found that the S-B arrangement has only a marginal advantage as regards diffracted intensity, and that both types of diffractometer may be successfully employed for characterization of thin films. Diffraction data obtained with very thin metallic films (down to 30 Å) are included for illustration. In order to eliminate reflections from the singlecrystal substrate in the B-B diffractometer, sample tilting was employed. Provided the tilting angle remains within 0.5°, sample tilting causes only moderate additional broadening of the thin film peaks.

Type
Research Article
Copyright
Copyright © Cambridge University Press 1988

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