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X-ray Diffraction Study of the Mechanical Elastic Properties of Nanometric W/Cu Multilayers

Published online by Cambridge University Press:  26 February 2011

Pascale Villain ,
Baptiste Girault ,
Pierre-Olivier Renault ,
Eric Le Bourhis ,
Philippe Goudeau  and
Frederic Badawi
Pascale Villain
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France, +33549496646, +33549496692
Baptiste Girault
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Pierre-Olivier Renault
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Eric Le Bourhis
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Philippe Goudeau
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Frederic Badawi
Affiliation:
[email protected], University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
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Abstract

The mechanical behavior of W/Cu multilayers with a period of 24 nm and a 1/3 W/Cu thickness ratio prepared by magnetron sputtering was analyzed using a method combining X-ray diffraction and tensile testing. Tests were performed both with a conventional and a synchrotron light source to analyze the elastic response of the system. Comparison between the strain-load curves obtained in both experimental conditions and estimated curves clearly shows that high quality synchrotron measurements are a preliminary condition for size-effect studies. Moreover, cyclic tests were used to determine the elastic domain of each material and compare their mechanical responses. Plastic strain was observed in copper while tungsten layers were still elastically strained until cracks appeared.

Keywords

elastic propertiesx-ray diffraction (XRD)nanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 977: Symposium FF – Processing-Structure-Mechanical Property Relations in Composite Materials , 2006 , 977-FF07-01-EE07-01
Copyright
Copyright © Materials Research Society 2007

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