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Water Soluble Polyanilines: Properties and Applications

Published online by Cambridge University Press:  16 February 2011

Marie Angelopoulos ,
Niranjan Patel  and
Jane M. Shaw
Marie Angelopoulos
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
Niranjan Patel
Affiliation:
IBM Microelectronics, East Fishkill, NY 12533
Jane M. Shaw
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

A new class of water soluble conducting polyanilines have been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines readily dissolve in water. These Materials can be applied as removable discharge layers for electron-beam (e-beam) lithography and for SEM Mask Metrology. Cross-linkable functionality can be incorporated on the polyanilinc backbone resulting in water soluble polyanilines that are radiation curable. Upon irradiation these materials cross-link and become insoluble and thus can be utilized as permanent conducting coatings for electrostatic discharge (ESD) applications. In addition, the cross-linkable polyanilines can be made into water developable conducting resists. 1.0μm conducting lines have been patterned with e-beam irradiation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 328: Symposium Q – Electrical, Optical, and Magnetic Properties of Organic Solid State Materials , 1993 , 173
Copyright
Copyright © Materials Research Society 1994

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