Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-28T05:13:12.463Z Has data issue: false hasContentIssue false
  • English
  • Français

Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport

Published online by Cambridge University Press:  20 January 2011

Z. Sanaee ,
S. Mohajerzadeh ,
M. Mehran  and
M. Araghchini
Z. Sanaee
Affiliation:
Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran
S. Mohajerzadeh
Affiliation:
Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran
M. Mehran
Affiliation:
Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran
M. Araghchini
Affiliation:
Nanoelectronic Center of Excellence, Thin Film and Nano-Electronic Laboratory, School of Electrical & Computer Engineering, University of Tehran, Tehran, Iran
Get access

Abstract

We report on the realization of high precision hollow structures directly on silicon suitable for liquid and gas/vapor transport. The formation of hollow structures requires high aspect ratio etching combined with bulk back-side micro-machining to realize silicon-based membranes. The use of a slant angle deposition method has been used as an alternative method for three-dimensional lithography. The transfer of acetone vapor through such tiny holes shows an anomalous behavior where a sharp rise is observed followed by an exponential and gradual decay. These structures can be eventually used as mass ion separation devices.

Keywords

microelectro-mechanical (MEMS)microstructurereactive ion etching
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s05-05
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Prausnitz, M. R., Advanced Drug Delivery Reviews 56, 581 (2004).CrossRefGoogle Scholar
2. Khanna, P., Strom, J. A., Malone, J. I. and Bhansali, S., Journal of Diabetes Science and Technology 2, 1122 (2008).CrossRefGoogle Scholar
3. Holman, G., Hanein, Y., Wyeth, R. C., Willows, A. O. D., Denton, D. D. and Böhringer, K. F., 2nd AnnualInternational IEEE-EMBS special Topic Conference on Microtechnologies in Medicine and Biology, 225 (2002).Google Scholar
4. Yu, L.M., Tay, F.E.H., Guo, D.G., Xu, L. and Yap, K.L., Sensors and Actuators A 151, 17 (2009).CrossRefGoogle Scholar
5. Chen, L. Y., Velásquez-García, L. F., Wang, X., Teo, K. and Akinwande, A. I., Technical Digest - International Electron Devices Meeting, IEDM, 843 (2007).Google Scholar
6. Sammak, A., Azimi, S., Izadi, N., Khadem Hosseinieh, B., and Mohajerzadeh, S., IEEE Journal of Microelectromechanical systems 16, pp. 912 (2007).CrossRefGoogle Scholar