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Ti-TiOx-Pt Metal-Oxide-Metal Diodes Fabricated via a Simple Oxidation Technique
Published online by Cambridge University Press: 12 January 2012
Abstract
This work presents the successful production, via a simple oxidation process, of Ti-TiOx-Pt Metal-Oxide-Metal diodes with excellent electrical asymmetry. TEM analysis has been used to verify the oxide thickness. A thicker layer produces better diodes, although they are of a less uniform nature. The conduction mechanism in these diodes is still under investigation.
- Type
- Research Article
- Information
- MRS Online Proceedings Library (OPL) , Volume 1415: Symposium HH/II/TT – MEMS, BioMEMS and Bioelectronics–Materials and Devices , 2012 , mrsf11-1415-tt04-06
- Copyright
- Copyright © Materials Research Society 2012
References
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