Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-02T22:29:05.162Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermal and Mechanical Properties of Cyclized Polybutadiene Dielectrics

Published online by Cambridge University Press:  25 February 2011

C. W. Wilkins Jr. ,
H. E. Bair ,
M. G. Chan  and
R. S. Hutton
C. W. Wilkins Jr.
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
H. E. Bair
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
M. G. Chan
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
R. S. Hutton
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
Get access

Abstract

We have studied some of the physical and mechanical properties of cyclized polybutadiene (CBR) dielectrics by dynamic mechanical analysis, thermal mechanical analysis, thermogravimetry, infrared analysis, and differential scanning calorimetry. Of interest is the difference in properties between thin (<30 μm) films which have been cured under vacuum and those which have been cured in air. Our results indicate that curing under vacuum prevents oxidation and reduces crosslinking. Vacuum cured films have 20% smaller moduli and 200 lower glass transition temperature than do films produced in air.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 359
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Tsunodo, T., New Photoresists of Cyclized Butadiene Polymers, Society of Plastics Engineers, Regional Technical Conference, Ellenville, NY, Oct. 1976, p. 84.Google Scholar
[2] Ito, H., Mizushima, Y., and Takepa, A., Jap. J. of Appl. Phys. 19(8), 2460 (1980).Google Scholar
[3] Wilkins, C. W. Jr., Salazar, M., Frye, R. C., Lin, A. W. C., Auborn, J. J., Wong, C. H., Lyons, A. M., unpublished results.Google Scholar
[4] Salazar, M., Wilkins, C. W. Jr., Ryan, V. W., Wang, T. T., Fall Meeting of the Electrochem. Soc., San Diego, Oct., 1986.Google Scholar
[5] Ryan, V. W. and Lin, A. W., unpublished results.Google Scholar
[6] Wang, T. T., Ryan, V. W. and Matsuoka, S., private communication.Google Scholar
[7] See for example: Shelton, J. R., Rubber Chem. Technol., 56(3), 671 (1983).Google Scholar
[8] Priola, A., Passerini, N., Bruzzone, M. and Cesca, S., Angew. Makromol. Chem. 88, 21 (1980).Google Scholar
[9] Bair, H. E. and Blylor, L. L. Jr., Proc. of 14th NATAS Conf., 5, 392 (1985).Google Scholar