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Texture Evolution and Stress in Silver Thin Films on Different Substrates Using X-ray Diffraction

Published online by Cambridge University Press:  01 February 2011

Yeongseok Zoo  and
Terry L. Alford
Yeongseok Zoo
Affiliation:
[email protected], Arizona State University, School of Materials, university drive and mill avenue, tempe, AZ, 85287, United States
Terry L. Alford
Affiliation:
[email protected], Arizona State University, School of Materials, tempe, AZ, 85287-8706, United States
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Abstract

Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO2 substrates had strong {111} texture when compared with Ag films on PEN. It was noted that the difference of strain energy density (δEε) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO2 (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO2 was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.

Keywords

x-ray diffraction (XRD)texturediffusion
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B08-07
Copyright
Copyright © Materials Research Society 2007

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References

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