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TCO Thin Films with Permittivity Control

Published online by Cambridge University Press:  31 January 2011

Timothy Gessert ,
Yuki Yoshida ,
Christian Fesenmaier ,
Joel Duenow  and
Timothy Coutts
Timothy Gessert
Affiliation:
[email protected], National Renewable Energy Lab, Golden, Colorado, United States
Yuki Yoshida
Affiliation:
[email protected], National Renewable Energy Lab, Golden, Colorado, United States
Christian Fesenmaier
Affiliation:
[email protected], National Renewable Energy Lab, Golden, Colorado, United States
Joel Duenow
Affiliation:
[email protected], National Renewable Energy Laboratory, Golden, Colorado, United States
Timothy Coutts
Affiliation:
[email protected], National Renewable Energy Lab, Golden, Colorado, United States
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Abstract

We have shown that variation in the real part of the dielectric permittivity of typical transparent conducting oxide (TCO) films can have a profound effect on the optical properties of the material. This has been demonstrated by adding small amounts of Zr to an ITO ceramic sputtering target and analyzing the resulting ITO and ITO:Zr (ITZO) films. Comparative electrical and optical analyses of the films show that, although the carrier concentration and mobility do not change appreciably by adding 1 wt.% ZrO2 to the ITO sputtering target, the plasma wavelength increases significantly for the ITZO film. We believe that the underlying physics of these results can be exploited in designing future TCO films for photovoltaic (PV) applications—especially those that embody industrial advantages but remain limited by low mobility.

Keywords

photovoltaictransparent conductorenergy generation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1165: Symposium M – Thin-Film Compound Semiconductor Photovoltaics–2009 , 2009 , 1165-M06-08
Copyright
Copyright © Materials Research Society 2009

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References

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