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Surface Stress Effects on Thin Film Growth

Published online by Cambridge University Press:  15 February 2011

R.C. Cammarata
R.C. Cammarata*
Affiliation:
Department of Materials Science and Engineering, The Johns Hopkins University, Baltimore, MD 21218
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Abstract

A review of surface and interface stresses relevant to thin film growth is presented. It is shown that surface stress effects that are generally ignored in the analysis of epitaxy can have an influence on the critical thickness for epitaxy, especially at larger Misfits. A discussion of intrinsic stress generation from surface stress is also presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 283
Copyright
Copyright © Materials Research Society 1994

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References

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