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Surface Stability and Flow Characteristics of BPSG Film by N2O Plasma Treatment

Published online by Cambridge University Press:  25 February 2011

C.G. Kim ,
H.S. Lee ,
Y.C. Ahn ,
U.I. Chung ,
J.K. Lee  and
J.G. Lee
C.G. Kim
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
H.S. Lee
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
Y.C. Ahn
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
U.I. Chung
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
J.K. Lee
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
J.G. Lee
Affiliation:
SamSung Electronics Co, R&D Center, Suwon PO Box #107, Kyungki-Do, Korea
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Abstract

BPSG films show good flow characteristics with the increase of boron and phosphorus concentration. As–deposited BPSG films with high boron and phosphorus concentration, however, have a dopant instability which results in film bursts, cracks, and precipitates, due to water absorption. Elimination of dopant instabilities of BPSG films by N2O plasma treatment is investigated. Film structure, composition and flow properties are evaluated by FT-IR, SIMS, and SEM, respectively. Dopant stability is examined after H2SO4 boiling. After H2SO4 boiling without N2O plasma treatment, BPSG films with high boron and phosphorus concentration show poor flow characteristics. Boron and phosphorus are leached out of the BPSG films by reaction with absorbed water during the H2SO4 boil. N2O plasma treatment results in a thin surface layer composed of Si-O-B bonds. These bonds do not dissolve in water. It is proposed that the thin layer consisting of Si-O-B bonds prevents the penetration of water into BPSG film during H2SO4 boiling.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 259: Symposium B – Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing , 1992 , 225
Copyright
Copyright © Materials Research Society 1992

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References

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