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Surface Roughness and Correlation Length Determined from X-Ray Diffraction Line Shape Analysis on Germanium (111)

Published online by Cambridge University Press:  21 February 2011

Q. Shen ,
J. M. Blakely ,
M. J. Bedzyk  and
K. D. Finkelstein
Q. Shen
Affiliation:
School of Applied and Engineering Physics Cornell University, Ithaca, NY 14853
J. M. Blakely
Affiliation:
Also at Department of Materials Science and Engineering
M. J. Bedzyk
Affiliation:
Also at Cornell High Energy Synchrotron Source (CHESS)
K. D. Finkelstein
Affiliation:
Also at Cornell High Energy Synchrotron Source (CHESS)
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Abstract

In an x-ray diffraction experiment performed on a germanium (111) crystal, both the rod-like and the diffuse-like scattering from the surface have been observed on a nonspecular crystal truncation rod. These scattering contributions can be explained using existing theory on surface roughness. Two treatments to the Ge (111) surface have been used to provide examples with different roughness characteristics for this study. Quantitative analysis results in a surface roughness of 2.5+0.3Å for a clean surface passivated with iodine and 4.3+0.5Å for a Syton polished surface covered with a naturally grown oxide layer. A typical lateral scale of flat surface regions has also been obtained from the transverse width of the diffuse-like scattering peak, and found to be 200 A and 400 Å respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 143: Symposium V – Synchrotron Radiation in Materials Research , 1988 , 215
Copyright
Copyright © Materials Research Society 1989

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