Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-03T08:18:34.858Z Has data issue: false hasContentIssue false

Surface Phase Separation and Ordering in Compound Semiconductor Alloys

Published online by Cambridge University Press:  28 February 2011

T.L. Mcdevitt
Affiliation:
Department of Metallurgical Engineering and Materials Science Carnegie Mellon University, Pittsburgh, PA 15213
S. Mahajan
Affiliation:
Department of Metallurgical Engineering and Materials Science Carnegie Mellon University, Pittsburgh, PA 15213
D.E. Laughlin
Affiliation:
Department of Metallurgical Engineering and Materials Science Carnegie Mellon University, Pittsburgh, PA 15213
W.A. Bonner
Affiliation:
Bellcore Red Bank, NJ 07701
V.G. Keramidas
Affiliation:
Bellcore Red Bank, NJ 07701
Get access

Abstract

The orientation dependence of phase separation has been examined in detail in InGaAsP layers grown by liquid phase epitaxy on (001), (110), (111)In and (123) InP substrates. It is shown that phase separation is two-dimensional in nature and does not occur along the growth direction for the cases examined. Further, phase separation takes place along the soft directions lying in the growth plane. These results very strongly suggest that phase separation evolves at the surface while the layer is growing.

CuPt-type ordering characteristics of InGaAsP layers are presented. In addition, the Influence of growth temperature and growth rate on domain sizes have been investigated in GaInP2 layers. A model has been proposed to rationalize the formation of domains and involves steps present on the surface. Results suggest that ordering like phase separation occurs at the surface while the layers is being deposited. It is inferred that the two microstructural features evolve concomitantly at the surface during layer growth.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Cremoux, B. de, Hirtz, P. and Ricciardi, J., Inst. Phys. Conf. Ser. #56, 115 (1981).Google Scholar
2. Stringfellow, G.B., J. Cryst. Growth, 58, 194 (1982).10.1016/0022-0248(82)90226-3Google Scholar
3. Onabe, K., Japan J. Appl. Phys. 21, 1323 (1982).Google Scholar
4. Henoc, P., Izrael, A., Quillec, M. and Launois, H., Appl. Phys. Letts. 40, 963 (1982).10.1063/1.92968Google Scholar
5. Launois, H., Quillec, M., Glas, F. and Treacy, M.J., Inst. Phys. Conf. Ser. #65, 537 (1982).Google Scholar
6. Mahajan, S., Dutt, B.V., Temkin, H., Cava, R.J. and Bonner, W.A., J. Cryst. Growth, 68, 589 (1984).10.1016/0022-0248(84)90466-4Google Scholar
7. Chu, S.N.G., Nakahara, S., Strege, K.E. and Johnston, W.D. Jr., J. Appl. Phys. 57, 4610 (1985).10.1063/1.335368Google Scholar
8. Norman, A.G. and Booker, G.R., J. Appl. Phys. 57, 4715 (1985).10.1063/1.335333Google Scholar
9. Kuan, T.S., Kuech, T.F., Wang, W.I. and Wilkie, E.L., Phys. Rev. Letts. 54, 201 (1985).10.1103/PhysRevLett.54.201Google Scholar
10. Kuan, T.S., Wang, W.I. and Wilkie, E.L., Appl. Phys. Letts. 51, 51 (1987).10.1063/1.98884Google Scholar
11. Jen, H.R., Cherng, M.J. and Stringfellow, G.B., Ibid, 48, 1603 (1986).Google Scholar
12. Shahid, M.A., Mahajan, S., Laughlin, D.E. and Cox, H.M., Phys. Rev. Letts. 58, 2567 (1987).10.1103/PhysRevLett.58.2567Google Scholar
13. Norman, A.G., Mallard, R.E., Murgatroyd, I.J., Booker, G.R., Moore, A.H. and Scott, M.D., Inst. Phys. Conf. Ser. #87, 77 (1987).Google Scholar
14. Murgatroyd, I.J., Norman, A.G., Booker, G.R. and Kerr, T.M., in Proc. 11th Inter. Conf. on Electron Microscopy Kyoto, edited by Imura, T., Maruse, S. and Suzuki, T. (Japan Soc. Electron Microscopy, Tokyo, 1986) p. 1497.Google Scholar
15. Ihm, Y.E., Otsuka, N., J. Klen and Morkoc, H., Appl. Phys. Letts. 51, 2013 (1987).10.1063/1.98277Google Scholar
16. Gomyo, A., Suzuki, T., Kobayashi, K., Kawata, S. and Hino, I., Ibid 50, 673 (1987).10.1063/1.98062Google Scholar
17. Gomyo, A., Suzuki, T. and Iijima, S., Phys. Rev. Letts. 60, 2645 (1988).10.1103/PhysRevLett.60.2645Google Scholar
18. McKernan, S., DeCooman, B.C., Carter, C.B., Bour, D.P. and Shealy, J.R., J. Mats. Res. 3, 406 (1988).10.1557/JMR.1988.0406Google Scholar
19. Kondow, M., Kakibayashi, H. and Minagawa, S., J. Cryst. Growth 88, 291 (1988).10.1016/0022-0248(88)90285-0Google Scholar
20. Bellon, P., Chevalier, J.P., Marton, G.P., DuPont-Nivet, E., Thlebaut, C. and Andre, J.P.', Appl. Phys. Letts. 52, 567 (1988).10.1063/1.99419Google Scholar
21. Ueda, O., Takikawa, M., Komeno, J. and Umebu, I., Japan J. Appl. Phys. 26, L1824 (1987).10.1143/JJAP.26.L1824Google Scholar
22. Shahid, M.A. and Mahajan, S., Phys. Rev. B38,1344 (1988).10.1103/PhysRevB.38.1344Google Scholar
23. Mahajan, S., Shahid, M.A. and Laughlin, D.E., Inst. Phys. Conf. Ser. #100, 143 (1989).Google Scholar
24. Mahajan, S. and Shahid, M.A. in Advances in Materials, Processing and Devices in III-V Compound Semiconductors, edited by Sadana, D.K., Eastman, L.E. and Dupuis, R. (Mater. Res. Soc. Proc. 144, Pittsburgh, PA), p. 169 (1989).Google Scholar
25. Mahajan, S. in Physics of Semiconductor Devices, edited by Khokle, W.S. and Jain, S.C. (Macmillan India Ltd, New Delhi, India), p. 443 (1989).Google Scholar
26. Augarde, E., Mpaskoutas, M., Bellon, P., Chevalier, J.P. and Martin, G.P., Inst. Phys. Conf. Ser. #100, 155 (1989).Google Scholar
27. McDevitt, T.L., Ph.D. Dissertation, Carnegie Mellon University, Pittsburgh, May (1990).Google Scholar
28. Alerhand, O.L., Vanderbilt, D., Meade, R.D. and Joannopoulos, J.D., Phys. Rev. Letts. 61, 1973 (1988).10.1103/PhysRevLett.61.1973Google Scholar
29. Treacy, M.M.J., Gibson, J.M. and Howle, A., Phil. Mag. A, 51, 389 (1985).10.1080/01418618508237563Google Scholar
30. Kondow, M., Kaklbayashi, H., Tanaka, T. and Minagawa, S., Phys. Rev. Letts. 63, 884 (1989).10.1103/PhysRevLett.63.884Google Scholar
31. Suzuki, T., Gomyo, A. and Iijima, S., J. Cryst. Growth 93, 396 (1988).10.1016/0022-0248(88)90559-3Google Scholar
32. Srivastava, G.P., Martins, J.L. and Zunger, A., Phys. Rev. B31, 2561 (1985).10.1103/PhysRevB.31.2561Google Scholar
33. Zunger, A., private communication (1990).Google Scholar
34. Nakayama, H. and Fujita, H., Inst. Phys. Conf. Ser. #79, 289 (1985).Google Scholar