Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-30T23:47:48.513Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface Erosion of TiO2 subjected to Energetic Oxygen Bombardment

Published online by Cambridge University Press:  04 February 2011

Roger Smith  and
Wolfhard Möller
Roger Smith
Affiliation:
Loughborough University, Ashby Road, Loughborough, LE11 3TU, UK. FZD Rossendorf, Bautzner Landsraße 400, 01328 Dresden, Germany.
Wolfhard Möller
Affiliation:
FZD Rossendorf, Bautzner Landsraße 400, 01328 Dresden, Germany.
Get access

Abstract

The effect of energetic oxygen bombardment of the TiO2 rutile {110} surface is studied by means of molecular dynamics simulations using a variable charge potential. A random selection of O atoms and O2 molecules are incident successively and normally onto the surface. At an energy of 5 eV the surface becomes saturated with oxygen until covered with between 1 and 2 monolayers of adatoms. As the fluence further increases Ti atoms are pulled out from the bulk and become surrounded by the O atoms forming well-defined atomic clusters on the surface which then desorb. At bombardment energies of 400 eV, the O atoms penetrate into the bulk and voids form whose surfaces are decorated with oxygen atoms. As the O fluence further increases the surface is sputtered and the voids then intersect the surface forming a very rough topography.

Keywords

oxidationplasma depositionTi
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1298: Symposium Q/R/T – Advanced Materials for Applications in Extreme Environments , 2011 , mrsf10-1298-r08-01
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Andersen, H. H and Bay, H. L, “Sputtering Yield Measurements,” Sputtering by Particle Bombardment I, ed. Behrisch, R. (Springer-Verlag, 1981) pp. 145–218.Google Scholar
2. Lewin, R., Howson, R.P., Bishop, C.A. and Ridge, M.I. Vacuum 36 95 (1986).Google Scholar
3. Rappe, A. and Goddard, W. III. J. Phys. Chem. 95, 3358 (1991).Google Scholar
4. Hallil, A., Tetot, R., Berthier, F. and Creuze, J., Phys. Rev. B 73 165406 (2006).Google Scholar
5. Vernon, L. J., Smith, R. and Kenny, S. D., Nucl. Instrum. and Meth. B 267 3022 (2009).Google Scholar
6. Vernon, L. J. PhD thesis, “Modelling the growth of Rutile” Loughborough University (2010).Google Scholar
7. Sanville, E. J., Vernon, L. J., Kenny, S. D., Smith, R., Moghaddam, Y., Browne, C. and Mulheran, P., Phys. Rev. B 80 235308 (2009).Google Scholar
8. Sanville, E. J., Vernon, L. J., Kenny, S. D., Smith, R., Phys. Rev. B submitted (2010).Google Scholar