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Study of Photoluminescence Properties of CuxO Thin Films Prepared by Reactive Radio Frequency Magnetron Sputtering

Published online by Cambridge University Press:  11 June 2015

Jiantuo Gan ,
Augustinas Galeckas ,
Vishnukanthan Venkatachalapathy ,
Heine N. Riise ,
Bengt G. Svensson  and
Edouard V. Monakhov
Jiantuo Gan
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
Augustinas Galeckas
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
Vishnukanthan Venkatachalapathy
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
Heine N. Riise
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
Bengt G. Svensson
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
Edouard V. Monakhov
Affiliation:
University of Oslo, Department of Physics /Center for Materials Science and Nanotechnology, P.O. Box 1048 Blindern, N-0316 Oslo, Norway
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Abstract

CuxO thin films have been deposited on a quartz substrate by reactive radio frequency (rf) magnetron sputtering at different target powers Pt (140-190 W) while keeping other growth process parameters fixed. Room-temperature photoluminescence (PL) measurements indicate considerable improvement of crystallinity for the films deposited at Pt>170 W, with most pronounced excitonic features being observed in the film grown using Pt=190 W. These results corroborate well with the surface morphology of the films, which was found more flat, smooth and homogeneous for Pt >170 W films in comparison with those deposited at lower powers.

Keywords

thin filmopticalphotovoltaic
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1792: Symposium CC/FF – Defects and Materials Issues in Semiconductors―Relationship to Optoelectronic Properties and Device Reliability , 2015 , mrss15-2135334
Copyright
Copyright © Materials Research Society 2015 

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References

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