Hostname: page-component-745bb68f8f-g4j75 Total loading time: 0 Render date: 2025-02-05T06:19:35.560Z Has data issue: false hasContentIssue false
  • English
  • Français

Structural Approach to Improve the Response Characteristics of Copper Phthalocyanine Thin Film-Based NO 2 Gas Sensor

Published online by Cambridge University Press:  10 February 2011

Tadashi Nagasawa ,
Kenji Murakami  and
Kenzo Watanabe
Tadashi Nagasawa
Affiliation:
Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Shizuoka, JAPAN
Kenji Murakami
Affiliation:
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Shizuoka, JAPAN, [email protected]
Kenzo Watanabe
Affiliation:
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Shizuoka, JAPAN, [email protected]
Get access

Abstract

In order to realize a high-sensitivity, low temperature operable NO2 gas sensor, thin films of at-form copper phthalocyanine (α-CuPc) have been deposited by vacuum sublimation. In this study, we have attempted to improve the gas-sensing characteristics through a modification of the film microstructure. Firstly, the gas sensitivity is remarkably increased by an insertion of higher-sensitive layer (vanadyl Pc film) between the α-CuPc film and the glass substrate in the low gas concentration range. Secondly, a reversibility in cycles of gas doping and dedoping is improved by film deposition on hydrofluoric acid-treated substrate. It is found from atomic force microscope analyses that this phenomenon may be closely related to a modification of the film microstructure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 488: Symposium J – Electrical, Optical & Magnetic Properties of Organic IV , 1997 , 329
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. For example: Sadaoka, Y., Yamazoe, N. and Seiyama, T., Denki Kagaku. 46, p.597 (1978) ( in Japanese).Google Scholar
2. Dogo, S., Germain, J.-P., Maleysson, C. and Pauly, A., Thin solid films. 219, p.251 (1992).Google Scholar
3. Cole, A., Mclloy, R.J., Thrope, S.C., Cook, M.J., McMurdo, J. and Ray, A.K., Sensors and Actuators B. 13–14, p.416 (1993).Google Scholar
4. Bott, B. and Jones, T.A., Sensors and Actuators. 5, p.43 (1984).Google Scholar
5. Jones, T.A., Bott, B. and Thrope, S.C., Sensors and Actuators. 17, p.467 (1989).Google Scholar
6. Wright, J. D., Roisin, P. and Rigby, G P., Sensors and Actuators B. 13–14, p.276 (1993).Google Scholar
7. Sadaoka, Y., Matsuguchi, M., Sakai, Y. and Moil, Y.. Sensors and Actuators B. 4, p.495 (1991).Google Scholar
8. Pizzini, S., Timo, G.L., Beghi, M., Butta, N. and Mari, C.M.. Sensors and Actuators. 17, p.481 (1989).Google Scholar
9. Snow, A.W. and Barger, W.R., in Leznoff, C.C. and Lever, A.B.P. (eds)., Phthalocyanines. properties and applications, VCH, New York, 1989, pp. 362–367.Google Scholar