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Step Contours in the Development of Periodically Modulated Vicinal Surfaces

Published online by Cambridge University Press:  15 February 2011

S. Tanaka ,
C. C. Umbach ,
J. M. Blakely ,
R. M. Tromp  and
M. Mankos
S. Tanaka
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
C. C. Umbach
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
J. M. Blakely
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
R. M. Tromp
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598.
M. Mankos
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598.
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Abstract

The connection between the atomic step distributions and decay modes of modulated surfaces is the focus of this paper. We have examined the arrangements of atomic steps on real 1- and 2-D periodic structures by scanning tunneling microscopy(STM) and low energy electron microscopy(LEEM) and have followed their development at temperature by LEEM. The steps present on the surface due to small ‘miscuts’ from exact singular planes can have major effects on both the mechanisms of shape development and the actual shapes that result. Major differences exist in the modes of development between 1- and 2-D periodic step arrays. Some of these observations have led us to a method for producing arrays of step-free Si(001) regions that may have application in device processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 440: Symposia CA – Structure and Evolution of Surfaces , 1996 , 25
Copyright
Copyright © Materials Research Society 1997

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