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Smart Piezoelectric PZT Microcantilevers with Inherent Sensing and Actuating Abilities for AFM and LFM

Published online by Cambridge University Press:  10 February 2011

C. Lee ,
T. Itoh ,
J. Chu ,
T. Ohashi ,
R. Maeda ,
A. Schroth  and
T. Suga
C. Lee
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan
T. Itoh*
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
J. Chu
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
T. Ohashi
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
R. Maeda
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan
A. Schroth
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
T. Suga
Affiliation:
RCAST The University of Tokyo, Komba 4–6–1, Meguro-Ku, Tokyo 153, Japan
*
2 Author to whom correspondence should be addressed. e-mail: [email protected]
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Abstract

Novel designs of the force sensing components for an atomic force microscope (AFM) and lateral force microscope (LFM) have been proposed in this study. By using PZT thin layers, a smart structure that can perform force sensing and feedback actuation at the same time is applied to the AFM. Clear images can be derived by an AFM equipped with this smart structure. A structure of two parallel PZT bars integrated on a SiO2 free standing cantilever has shown potential for operation in an LFM, because a difference in the piezoelectric charge outputs from these two beams will be induced by frictional force when the cantilever end quasi-staticly contacts with the sample surface in dynamic scanning across the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 35
Copyright
Copyright © Materials Research Society 1997

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Footnotes

1

Microsystems Lab., ITRI, 195, Sec. 4, Chung Hsing Rd., Chutung, Taiwan 310, Republic of China.

3

NEDO fellow on leave from Micromachine Center Japan.

References

REFERENCES

1. Sarid, D., Scanning Force Microscopy. Oxford Univ. Press, New York, 1991.Google Scholar
2. Hansma, H. G., J. Vac. Sci. Technol. B, 14, p. 1390 (1996).Google Scholar
3. Yano, K., et al., J. Vac. Sci. Technol. B, 14, p. 1353 (1996).Google Scholar
4. Minne, S. C., Manaus, S. R., Atalar, A., and Quate, C. F., J. Vac. Sci. Technol. B, 14, p. 2456 (1996).Google Scholar
5. Mate, C. M., McClelland, G. M., Erlandsson, R., and Chiang, S., Phys. Rev. Lett., 59, p. 1942 (1987).Google Scholar
6. Goddenhenrich, T., Lemke, H., Hartmann, U., and Heiden, C., J. Vac. Sci. Technol. A, 8, p. 383 (1990).Google Scholar
7. Itoh, T. and Suga, T., Nanotechnology, 4, p. 218 (1993).Google Scholar
8. Tortonese, , Barrett, R. C., and Quate, C. F., Appl. Phys. Lett., 62, p. 834 (1993).Google Scholar
9. Itoh, T., Ohashi, T., and Suga, T., IEICE Trans, on Electron., E78–C, p. 146 (1995).Google Scholar
10. Lee, C., Maeda, R., Itoh, T., and Suga, T., Proc. 3rd France-Japan Congress & 1st Europe-Asia Congress on Mechatronics, Besançon, France, 1, p. 285 (1996).Google Scholar
11. Chu, J., Itoh, T., Lee, C., and Suga, T., Abstracts of NANO IV, 4th Int. Conf. on Nanometer-scale Sci. & Technol., Beijing, P.R. China (the American Vacuum Soc, New York, NY 10005, 1996), p. 27.Google Scholar
12. Minne, S. C., Flueckiger, Ph., Soh, H. T., and Quate, C. F., J. Vac. Sci. Technol. B, 13, p. 1380 (1995).Google Scholar
13. Itoh, T., Ohashi, T., and Suga, T., Proc. IEEE MEMS '96, San Deigo, (IEEE, Piscataway, NJ 08855, 1996),p. 451.Google Scholar
14. Chui, B. W., Stowe, T. D., Kenny, T. W., Mamin, H. J., Terris, B. D., and Rugar, D., Appl. Phys. Lett., 69, p.2767 (1996).Google Scholar
15. Lee, C., Itoh, T., and Suga, T., IEEE Trans. Ultras., Ferro., and Fre. control, 43, p. 553 (1996).Google Scholar
16. Lee, C., Ph.D. Dissertation, The University of Tokyo, Tokyo, 1996, p. 116.Google Scholar
17. Itoh, T., Lee, C., and Suga, T., Appl. Phys. Lett., 69, p. 2036 (1996).Google Scholar
18. Minne, S. C., Manaus, S. R., Atalar, A., and Quate, C. F., Appl. Phys. Lett., 68, p. 1427 (1996).Google Scholar
19. Rabe, U., Janser, K., and Arnold, W., Rev. Sci. Instrum., 67, p. 3281 (1996).Google Scholar