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Self-Assembled Monolayers as High-Resolution Etch Masks and Templates for Organic Molecular Assembly

Published online by Cambridge University Press:  17 March 2011

C. K. Harnett ,
A. G. Lopez ,
K. M. Satyalakshmi ,
Y.-F. Chen  and
H. G. Craighead
C. K. Harnett
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853
A. G. Lopez
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853
K. M. Satyalakshmi
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853
Y.-F. Chen
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853
H. G. Craighead
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853
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Abstract

We have used a variety of self-assembled monolayers as resists for low energy electron beam patterning. These compounds can be used as high-resolution patternable linker molecules for selected area binding of proteins and other organic compounds, as well as nanoparticles with organic chemical coatings. Because these systems can be aligned in registry to existing patterns, the organic systems may be positioned with the accuracy of electron-beam lithography. We have also explored the use of self-assembled monolayers for the creation of sub-wavelength artificial dielectric systems. The ultra-thin patterned monolayer is combined with a contrast-enhancing etch process to create high aspect ratio structures. This technique can be used to fabricate diffractive optical devices in a single-step process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 638: Symposium F – Microcrystaline & Nanocrystalline Semiconductors-2000 , 2000 , F10.1.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Harnett, C. K., Satyalakshmi, K. M., and Craighead, H. G., Appl. Phys. Lett. 76, 2466 (2000).Google Scholar
2. Harnett, C. K., Satyalakshmi, K. M., and Craighead, H. G., Langmuir (in press, to be published Jan. 9, 2001).Google Scholar
3. Lopez, A. G., Ph.D. Thesis, School of Applied and Engineering Physics, Cornell University, Ithaca NY 14850 (2000).Google Scholar