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The Role of Dilution Gas in Plasma Deposition of Amorphous Hydrogenated Carbon

Published online by Cambridge University Press:  16 February 2011

Hsueh Yi Lu  and
Mark A. Petrich
Hsueh Yi Lu
Affiliation:
Department of Chemical Engineering, Northwestern University, Evanston, Illinois 60208
Mark A. Petrich
Affiliation:
Department of Chemical Engineering, Northwestern University, Evanston, Illinois 60208
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Abstract

We have studied the effect of hydrogen dilution on the structural and optical properties of plasma-deposited amorphous hydrogenated carbon. Electron spin resonance reveals that the dangling bond density does not change with hydrogen dilution, presumably because there is an excess of hydrogen present during these depositions. Information from 13C NMR, however, shows that hydrogen dilution induces changes in composition, hydrogenation, sp2/sp3 carbon bonding ratio, and the size of sp2 bonded clusters. These changes modify the electronic band structure, as observed by shifts in optical measurements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 223: Symposium E – Low Energy Ion Beam and Plasma Modification of Materials , 1991 , 327
Copyright
Copyright © Materials Research Society 1991

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References

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