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Rf Magnetron Sputtering Epitaxially Grown (Pb,La)TiO3 Thin Films on (0001) A12O3 and (001) SrTiO3 for Nonlinear Optical Applications

Published online by Cambridge University Press:  10 February 2011

U. Rabibisoa  and
B. Agius
U. Rabibisoa
Affiliation:
Groupe Physique des films minces, Institut d'Optique, B. P. 147, 91403 Orsay, France e-mail: [email protected]
B. Agius
Affiliation:
Groupe Physique des films minces, Institut d'Optique, B. P. 147, 91403 Orsay, France
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Abstract

Ferroelectrics are known to be excellent materials for nonlinear optics. Miniaturization of circuits using these materials requires an optimization of structural and morphological properties of thin films, to minimize optical losses. The first condition is the use of epitaxially grown thin films. The second one is the optimization of the morphological properties, in particular the roughness at the air/film and film/substrate interfaces must be the lowest possible.

The aim of this work is to study the effect of the deposition atmosphere on these properties for PLT thin films grown on (0001) A12O3 and (001) SrTiO3.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 711
Copyright
Copyright © Materials Research Society 1999

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References

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