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Recrystallization of Amorphous Silicon Using Rapid Thermal Processing, Laser Annealing and Furnace Heating

Published online by Cambridge University Press:  22 February 2011

J. Viatella ,
R.K. Singi ,
R.P.S. Thiakur ,
G. Sandhu  and
S.D. Harkness
J. Viatella
Affiliation:
Department of Material Science and Engineering, University of Florida, Gainesville 32611 Micron Semiconductor Inc., 2805 East Columbia Road, Boise, ID 83706
R.K. Singi
Affiliation:
Department of Material Science and Engineering, University of Florida, Gainesville 32611 Micron Semiconductor Inc., 2805 East Columbia Road, Boise, ID 83706
R.P.S. Thiakur
Affiliation:
Department of Material Science and Engineering, University of Florida, Gainesville 32611 Micron Semiconductor Inc., 2805 East Columbia Road, Boise, ID 83706
G. Sandhu
Affiliation:
Department of Material Science and Engineering, University of Florida, Gainesville 32611 Micron Semiconductor Inc., 2805 East Columbia Road, Boise, ID 83706
S.D. Harkness
Affiliation:
Department of Material Science and Engineering, University of Florida, Gainesville 32611 Micron Semiconductor Inc., 2805 East Columbia Road, Boise, ID 83706
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Abstract

Recrystallization of amorphous silicon has been investigated using conventional furnace annealing, incoherent light-based rapid thermal annealing (RTA) and pulsed laser annealing using excimner laser (wavelength=248 nm, energy density = 0.1−0.6 J/cm2) at a pulse width of approximately 20 nanoseconds. The effects of annealing methods are characterized for grain growth and crystallized orientation using transmission electron microscopy (TEM) and X-ray diffraction analysis. The various recrystallization methods are compared based on the structural properties of the resulting film and optimized thermal budgets for each heating mechanism are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 342: Symposium G – Rapid Thermal and Integrated Processing III , 1994 , 297
Copyright
Copyright © Materials Research Society 1994

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References

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