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“Recent Development in Hitachi TEM”

Published online by Cambridge University Press:  21 February 2011

K. Kubozoe ,
M. Tomita ,
I. Matsui ,
S. Isakozawa  and
S. Kamimura
K. Kubozoe
Affiliation:
Naka Works, Hitachi, Ltd., Katsuta, Ibaraki, Japan 312
M. Tomita
Affiliation:
Naka Works, Hitachi, Ltd., Katsuta, Ibaraki, Japan 312
I. Matsui
Affiliation:
Naka Works, Hitachi, Ltd., Katsuta, Ibaraki, Japan 312
S. Isakozawa
Affiliation:
Naka Works, Hitachi, Ltd., Katsuta, Ibaraki, Japan 312
S. Kamimura
Affiliation:
Naka Works, Hitachi, Ltd., Katsuta, Ibaraki, Japan 312
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Extract

With the modern ultra high vacuum technology, it is easy to achieve 10−1 Torr vacuum. This is when a vacuum chamber has been designed and built specifically for this purpose. Electron microscope column is not a simple vacuum chamber. It is a precision equipment that allows electron microscopy of various specimens. The column is designed primarily for high resolution microscopy and it is not necessarily suitable for achieving ultra high vacuum condition. This is clear from a long TEM history. No dependable ultra high vacuum microscope has ever been built until very recently. Many attempts have been made so far to convert conventional microscopes into UHV-microscope, particularly specimen chamber area.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 259
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

[1] Takayanagi, K., et al., J.Phys. E:Sci. Instrum., 11(1978)441 Google Scholar
[2] Osakabe, N. et al., Appl. Phys. Lett. 42(1983)746 Google Scholar
[3] Hasegawa, S. et al., 46th Meeting EMSA (1988)842Google Scholar