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Reactive-Sputter Deposition of TiN/ZrN and TiN/CrN Multilayers: Structural and Mechanical Properties

Published online by Cambridge University Press:  10 February 2011

W.-H. Soe ,
T. Kitagaki ,
H. Ueda ,
N. Shima ,
M. Otsuka  and
R. Yamamoto
W.-H. Soe
Affiliation:
Institute of Industrial Science, University of Tokyo, 7–22–1 Roppongi, Minato-ku, Tokyo 106, Japan, [email protected]
T. Kitagaki
Affiliation:
Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo 106, Japan
H. Ueda
Affiliation:
Hitachi Tool Engineering, Ltd., 13–2 Shinizumi, Narita-shi, Chiba 286, Japan
N. Shima
Affiliation:
Hitachi Tool Engineering, Ltd., 13–2 Shinizumi, Narita-shi, Chiba 286, Japan
M. Otsuka
Affiliation:
Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo 106, Japan
R. Yamamoto
Affiliation:
Institute of Industrial Science, University of Tokyo, 7–22–1 Roppongi, Minato-ku, Tokyo 106, Japan, [email protected]
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Abstract

Polycrystalline TiN/ZrN multilayers with a 7.5% lattice mismatch between the layers and TiN/CrN multilayers with a 2.3% mismatch were grown by reactive magnetron sputtering on WC/Co sintered hard alloy substrates. Multilayer structure and composition modulation amplitudes were studied using x-ray diffraction method. Hardness and elastic modulus were measured by nanoindentation testing. Hardness of TiN/ZrN multilayers decreased rapidly with increasing bilayer thickness (Λ), peaking at hardness values ≈30% lower than rul e-of-mixtures values at Λ=30 Å, before increasing slightly with further increases in Λ. A comparison with other lattice mismatched systems, TiN/VN and TiN/NbN, showed a similar hardness variation, but a sign was negative. The results suggest that coherency strains were responsible for the larger hardness change. Nanoindenter elastic modulus results showed the same behavior with hardness dependence, i.e., elastic softening at Λ=30 Å. The results of TiN/CrN systems showed no hardness and elastic anomalies within boundaries corresponding to individual values. It was thought too large the difference between hardness (or modulus) of TiN and CrN.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 458: Symposium W – Interfacial Engineering for Optimized Properties , 1996 , 373
Copyright
Copyright © Materials Research Society 1997

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References

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