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Reaction Kinetics on Diamond: Measurement of HI Atom Destruction Rates

Published online by Cambridge University Press:  22 February 2011

Stephen J. Harris  and
Anita M. Weiner
Stephen J. Harris
Affiliation:
Physical Chemistry Dept., General Motors R&D Center, Warren, MI 48090-9055
Anita M. Weiner
Affiliation:
Physical Chemistry Dept., General Motors R&D Center, Warren, MI 48090-9055
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Abstract

We describe the first measurements of reaction kinetics between diamond and a gas phase species—H atoms—involved in its formation. We develop a remarkably simple method to measure H atom concentrations and use the method to measure γd, the destruction probability of H atoms on diamond at 20 torr and 1200 K. We find γd = 0.12. This value is close to that estimated from gas phase alkane rate constants.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 117
Copyright
Copyright © Materials Research Society 1994

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