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The Pyrolytic Conversion of Perhydropolysilazane into Si3N4: X-Ray Diffraction Analysis

Published online by Cambridge University Press:  15 February 2011

Cheryl R. Blanchard  and
Stuart T. Schwab
Cheryl R. Blanchard
Affiliation:
Southwest Research Institute, P.O. Drawer 28510, San Antonio, TX 78228
Stuart T. Schwab
Affiliation:
Southwest Research Institute, P.O. Drawer 28510, San Antonio, TX 78228
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Abstract

X-ray diffraction analysis was used to study the pyrolytic conversion of apreceramic polysilazane into Si3N4. Quantitative datafor crystallite size, phase composition, and degree of crystallinity versuspyrolysis temperature and atmosphere (N2 and NH3) arepresented. Pyrolytic products produced under N2 and NH3 atmospheres consist of microcrystals of silicon and a- and β-Si3N4. Under both atmospheres, a majority of thechar is crystalline at ∼ 1270°C, and the entire char is crystallized at1400°C. Pyrolysis under an NH3 atmosphere produces nearstoichiometric Si3N4, while pyrolysis under N2 produces a silicon-rich material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 321: Symposium E – Crystallization and Related Phenomena in Amorphous Materials—Ceramics, Metals, Polymers, and Semiconductors , 1993 , 573
Copyright
Copyright © Materials Research Society 1994

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References

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