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Production Technologies of Film Solar Cell

Published online by Cambridge University Press:  01 February 2011

Akihiro Takano ,
Katsuya Tabuchi ,
Masayoshi Uno ,
Masayuki Tanda ,
Takehito Wada ,
Makoto Shimosawa ,
Yasushi Sakakibara ,
Shinji Kiyofuji ,
Hironori Nishihara  and
Hirofumi Enomoto
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Akihiro Takano
Affiliation:
takano-akihiro@fujielectric.co.jp, Fuji Electric Advanced Technology Co., Ltd., Material & Science Laboratory, 2-2-1, Nagasaka, Yokosuka, Kanagawa, 240-0194, Japan, +81-46-857-6730, +81-46-857-6233
Katsuya Tabuchi
Affiliation:
tabuchi-katsuya@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Masayoshi Uno
Affiliation:
uno-masayoshi@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Masayuki Tanda
Affiliation:
tanda-masayuki@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Takehito Wada
Affiliation:
Wada-takehito@fujielectric.co.jp, Fuji Electric Advanced Technology Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Makoto Shimosawa
Affiliation:
shimosawa-makoto@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Yasushi Sakakibara
Affiliation:
sakakibara-yasushi@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Shinji Kiyofuji
Affiliation:
kiyofuji-shinji@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Hironori Nishihara
Affiliation:
nishihara-hironori@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Hirofumi Enomoto
Affiliation:
hirofumi-enomoto@fesys.co.jp, Fuji Electric Systems Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
Tomoyoshi Kamoshita
Affiliation:
kamoshita-tomoyoshi@fujielectric.co.jp, Fuji Electric Advanced Technology Co., Ltd., Yokosuka, Kanagawa, 240-0194, Japan
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Abstract

Light-weight, large-area and flexible solar cells and modules were developed. Roll-to-roll processes including an improved film deposition process named “Stepping-roll process” are used to fabricate large-area hydrogenated amorphous silicon-based solar cells in succession on plastic film substrates. A unique device having through-hole contacts was developed and applied to simplify the production processes and to generate high voltage using connection in series. Production technologies, such as (1) light-weight and large area module fabrication, (2) plasma condition controlled chemical vapor deposition, (3) low substrate temperature selective reactive sputtering, and (4) large-area uniform transparent conductive oxide film deposition are reviewed.

Keywords

filmchemical vapor deposition (CVD) (deposition)sputtering
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 910: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology – 2006 , 2006 , 0910-A25-04
Copyright
Copyright © Materials Research Society 2006

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References

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