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Piezoresponse Measurements for Pb(Zr,Ti)O3 Island Structure Using Scanning Probe Microscopy

Published online by Cambridge University Press:  21 March 2011

H. Fujisawa ,
K. Morimoto ,
M. Shimizu ,
H. Niu ,
K. Honda  and
S. Ohtani
H. Fujisawa
Affiliation:
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology, Shosha 2167, Himeji, Hyogo 671-2201, JAPAN
K. Morimoto
Affiliation:
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology, Shosha 2167, Himeji, Hyogo 671-2201, JAPAN
M. Shimizu
Affiliation:
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology, Shosha 2167, Himeji, Hyogo 671-2201, JAPAN
H. Niu
Affiliation:
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology, Shosha 2167, Himeji, Hyogo 671-2201, JAPAN
K. Honda
Affiliation:
Fujitsu Laboratory Ltd, 10-1 Wakamiya Morinosato, Atsugi, Kanagawa 243-0197, JAPAN
S. Ohtani
Affiliation:
Fujitsu Laboratory Ltd, 10-1 Wakamiya Morinosato, Atsugi, Kanagawa 243-0197, JAPAN
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Abstract

Piezoresponse measurements using scanning probe microscopy (SPM) were performed for island structures at the initial growth stage of Pb(Zr,Ti)O3 (PZT) (Zr/Ti=0/100, 24/76 and 74/26) thin films prepared by metalorganic chemical vapor deposition(MOCVD). Deposition times were varied from 5s to 7min to control the size of PZT islands. When deposition times were shorter than 3min, (111)-oriented triangular-shaped PZT islands were observed before forming a continuous film. The width and height of PZT islands deposited at 3min were 160 and 70nm for Zr/Ti = 0/100, 100 and 30nm for Zr/Ti = 24/76, and 80 and 20nm for Zr/Ti = 74/26, respectively. The size of islands decreased with increasing the Zr composition. Hysteresis loops due to polarization switching were observed in the phase difference and displacement of piezoresponse measured using scanning probe microscopy (SPM). This result proves that nano-size PZT islands have weak ferroelectricity. The minimum width and height of PZT islands which showed ferroelectricity were 70 and 30nm for Zr/Ti=24/76.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC10.4.1
Copyright
Copyright © Materials Research Society 2001

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