Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-28T10:17:10.905Z Has data issue: false hasContentIssue false
  • English
  • Français

Piezoresponse in Ferroelectric PZT Thin Films

Published online by Cambridge University Press:  26 February 2011

Dmitry Kiselev ,
Igor Bdikin ,
Alena Movchikova ,
Andrei Kholkin ,
Gunnar Suchaneck  and
Gerald Gerlach
Dmitry Kiselev
Affiliation:
[email protected], University of Aveiro, Dept. of Ceramics and Glass Engineering, Campus de Santiago, Aveiro, 3810-193, Portugal
Igor Bdikin
Affiliation:
[email protected], University of Aveiro, Dept. of Ceramics and Glass Engineering, Aveiro, 3810-193, Portugal
Alena Movchikova
Affiliation:
[email protected], Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
Andrei Kholkin
Affiliation:
[email protected], University of Aveiro, Dept. of Ceramics and Glass Engineering, Aveiro, 3810-193, Portugal
Gunnar Suchaneck
Affiliation:
[email protected], Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
Gerald Gerlach
Affiliation:
[email protected], Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
Get access

Abstract

Poled ferroelectric lead zirconate titanate (PZT) films comprising a (111) texture on (100)Si/SiO2/(111)Pt substrates were investigated by piezoresponse force microscopy (PFM). Depending on the film thickness, the crystallite orientation varies from purely (111) (related to the Pt bottom electrode orientation) to a more random texture. By PFM, 90° domains with a width of 50 nm were obtained in an individual grain Pb(Pb0.10Zr0.21Ti0.69)O3 − PPZT (10/21/69). It was shown that the virgin (unpoled) films possess large piezoelectric activity comparable to that after local poling (self-polarization effect). This corresponds to a clear predominance of the domains with a polarization oriented from the bottom electrode to the free surface of the film.

Keywords

scanning probe microscopy (SPM)thin filmpiezoresponse
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 966: Symposium T – Ferroelectrics and Multiferroics , 2006 , 0966-T07-02
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yang, J.-S., Kim, S.-H., Yeom, J.-H., Koo, C.-Y., Hwang, C. S., Yoon, E., Kim, D-J., J. Ha Integrated Ferroelectrics, 54: 515–525, 2003 Google Scholar
2. Noheda, B., Cox, D. E., Shirane, G., Gonzalo, J. A., Cross, L. E., and Park, S.-E., Appl. Phys. Lett., 74, 2059 (1999); B. Noheda, J. A. Gonzalo, L.E.Cross, R.Guo, S.-E.Park, D. E. Cox, and G. Shirane, Phys. Rev. B 61, 8687 (2000).Google Scholar
3. Du, X.-H., Zheng, J., Belegundu, U. and Uchino, K., Appl. Phys. Lett 72, 2421 (1998).Google Scholar
4. Goh, W. C., Xu, S. Y., Wang, S. J., and Ong, C. K., J. Appl. Phys. 89, 4497 (2001).Google Scholar
5. Xu, F., Trolier-McKinstry, S., Ren, W., Xu, B., Xie, Z.-L., and Hemker, K. J., J. Appl. Phys. 89, 1336 (2001).Google Scholar
6. Rogan, R. C., Stundag, E., Clausen, B., and Daymond, M. R., J. Appl. Phys. 93, 4104 (2003).Google Scholar
7. Taylor, D. V. and Damjanovic, D., Appl. Phys. Lett 76, 1615 (2000); D.-J. Kim, J.-P. Maria, A. I. Kingon, and S. K. Streiffer, J.Appl.Phys. 93 (2003) 5568.]Google Scholar
8. Suchaneck, G., Lin, Wen-Mei, Gerlach, G., Deyneka, A. and Jastrabik, L., Int. Ferroelectrics 80, 189 2006.Google Scholar
9. Gruverman, A., Auciello, O., and Tokumoto, H., Annu. Rev. Mater. Sci. 28, 101 (1998).Google Scholar
10. Kholkin, A. L., Shvartsman, V. V., Emelyanov, A. Yu., Poyato, R., Calzada, M. L. and Pardo, L., Appl. Phys. Lett. 82, 2127, 2003.Google Scholar
11. Suchaneck, G., Gerlach, G., Poplavko, Yu., Kosarev, A.I., and Andronov, A.N., MRS Symp. Proc. 655, C.C.7.7. 2002.Google Scholar
12. Wu, A., Vilarinho, P. M., Shvartsman, V. V., Kholkin, A. L., and Suchaneck, G., Nanotechnology 16, 2587, 2005.Google Scholar
13. Kholkin, A.L., Brooks, K.G., Taylor, D.V., Hiboux, S., and Setter, N., Int. Ferroelectrics 22, 525, 1998.Google Scholar
14. Lu, X., Schlaphof, F., Grafstrom, S., Loppacher, C. & Eng, L., et al, Appl. Phys. Lett., 81 3215, 2002.Google Scholar
15. Bruchhaus, R., Pitzer, D., Schreiter, M., and Wersing, W., J. Electroceramics 3, 151, 1999 Google Scholar
16. Suchaneck, G., Koehler, R., Padmini, P., Sandner, T., Frey, J., and Gerlach, G., Surface and Coatings Technology 116, 1238, 1999.Google Scholar
17. Deineka, A., Jastrabik, L., Suchaneck, G., Gerlach, G., Phys. Stat. Sol. (a) 188, 1552, 2001.Google Scholar
18. Suchaneck, G., Lin, Wen-Mei, Gerlach, G., Deyneka, A., Jastrabik, L., Int. Ferroelectrics 80, 189, 2006.Google Scholar