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Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films

Published online by Cambridge University Press:  11 February 2011

Jacek Baborowski ,
Nicolas Ledermann  and
Paul Muralt
Jacek Baborowski
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
Nicolas Ledermann
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
Paul Muralt
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland.
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Abstract

Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a oxidized and platinized silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wafers have been applied to obtain a good definition of the silicon part of the membrane. Test devices have been characterized in air and in an insulating liquid.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J12.4
Copyright
Copyright © Materials Research Society 2003

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References

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