Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-24T18:47:15.753Z Has data issue: false hasContentIssue false
  • English
  • Français

Photo-induced Deposition of Nanostructured Thin Films by UV-exposure of Heteroleptic Ti-alkoxide Solutions

Published online by Cambridge University Press:  01 February 2011

J. David Musgraves ,
B.G. Potter Jr.  and
Timothy J. Boyle
J. David Musgraves
Affiliation:
[email protected], University of Arizona, Department of Materials Science and Engineering, Arizona Materials Laboratory, 4715 E. Fort Lowell Rd., Tucson, AZ, 85712, United States
B.G. Potter Jr.
Affiliation:
[email protected], University of Arizona, Department of Materials Science and Engineering, Tucson, AZ, 85712, United States
Timothy J. Boyle
Affiliation:
[email protected], Sandia National Laboratories, Advanced Materials Laboratory, Albuquerque, NM, 87185, United States
Get access

Abstract

Photodeposited physical relief structures have been formed via the UV-irradiation of solutions of the heteroleptic titanium alkoxide, (OPy)2Ti(TAP)2. Raman studies of the films produced confirm the photoinitiation of hydrolysis and condensation reactions in the molecular structure, leading to the development of an insoluble solid phase. Using a shadow mask technique, these films were deposited directly from solution with microscale patterning and their structure and properties were studied as a function of both irradiation conditions (UV-fluence and intensity) as well as precursor solution chemistry (water content). Variations in nanostructure are visible in scanning electron micrographs, with a higher solution water content producing a more condensed, i.e. less porous, film.

Keywords

nanostructuresol-geloptical
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1074: Symposium I – Synthesis and Metrology of Nanoscale Oxides and Thin Films , 2008 , 1074-I03-13
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Boyle, T.J. et al. , J. Inorg. Chem. 46 1825 (2007).Google Scholar
2. Potter, B.G. Jr., Musgraves, J.D. and Boyle, T.J. J. Non-Cryst. Solids. 354 2017 (2008).Google Scholar
3. Socrates, G. Infrared and Raman Characteristic Group Frequencies. John Wiley & Sons, 2001.Google Scholar
4. Tohge, N. Zhao, G. and Chiba, F. Thin Solid Films 351 85 (1999).Google Scholar
5. Segawa, H. J. Ceram. Soc. of Japan 116 251 (2008).Google Scholar
6. Watanabe, A. and Miyashita, T. Chem. Lett. 35 1130 (2006).Google Scholar
7. Park, O.H. et al. , Appl. Phys. Lett. 90 233102 (2007).Google Scholar