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Phase Analysis in PACVD Diamond Films via Oxidation Kinetics

Published online by Cambridge University Press:  21 February 2011

William E. Brower Jr. ,
Robert Bauer  and
Nick M. Sbrockey
William E. Brower Jr.
Affiliation:
Marquette University, Dept. of Mechanical and Industrial Engineering, Milwaukee, WI 53233
Robert Bauer
Affiliation:
Marquette University, Dept. of Mechanical and Industrial Engineering, Milwaukee, WI 53233
Nick M. Sbrockey
Affiliation:
Eaton Corporation, Milwaukee, WI
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Abstract

The detection and quantification of the diamond cubic, graphite, and amorphous carbon phases in plasma assisted chemical vapor deposition of diamond films is difficult by diffraction techniques. We have employed thermogravimetric analysis (TGA) to analyze these phases by comparison of the oxidation rates, both in the as deposited films and in physical mixtures of powders of the phases. The oxidation rates of the three allotropes of carbon differ enough to allow a separation of peaks in the differential of the weight loss versus time/temperature plots. TGA scans were run between 2.5 and 100 degrees per minute to achieve optimum separation of the oxidation rates as indicated by the weight loss curves. The peak of the differential of the weight loss versus temperature curves indicates the temperature of maximum oxidation rate. The appearance of multiple peaks appears to be a sensitive indicator of the presence of mixed phases in the PACVD deposites on silicon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 190: Symposium M – Plasma Processing and Synthesis of Materials III , 1990 , 125
Copyright
Copyright © Materials Research Society 1991

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References

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