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Palladium Based Micro-Membrane Hydrogen Gas Separator-Reactor in a Miniature Fuel Processor for Micro Fuel Cells

Published online by Cambridge University Press:  15 March 2011

Sooraj V. Karnik ,
Miltiadis K. Hatalis  and
Mayuresh V. Kothare
Sooraj V. Karnik
Affiliation:
Department of Electrical and Computer Engineering, Department of Chemical Engineering, Lehigh University, Bethlehem, PA 18015, USA
Miltiadis K. Hatalis
Affiliation:
Department of Electrical and Computer Engineering, Department of Chemical Engineering, Lehigh University, Bethlehem, PA 18015, USA
Mayuresh V. Kothare
Affiliation:
Department of Chemical Engineering, Lehigh University, Bethlehem, PA 18015, USA
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Abstract

A novel palladium-based micromembrane has been fabricated and tested which has the potential to be used for carbon monoxide shift reaction and hydrogen gas separation in a miniature fuel processor for micro fuel cells. The micromembrane structure is built in silicon substrate, using standard MEMS microfabrication processes. The four layers, viz., copper, aluminum, spin-on-glass (SOG) and palladium form the composite micromembrane. Copper, aluminum and SOG serve as a structural support for the palladium film. Copper also acts as a catalyst in the shift reaction that converts unwanted carbon monoxide gas into hydrogen, which in turn is separated by the palladium micro-membrane. For a particular combination of thicknesses for various layers, the composite micro-membrane withstands a pressure gradient up to 1 atm. The micromembrane separates hydrogen from a 20% hydrogen balance nitrogen gas mixture at room temperature.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B7.2
Copyright
Copyright © Materials Research Society 2002

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