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Optimization of MBE of CdTe/CdTe: Refinement in Structural Quality Evaluation of MBE Grown (111) CdTe

Published online by Cambridge University Press:  03 September 2012

M. B. Lee ,
T. Fanning ,
D. Di Marzio ,
L. G. Casagrande  and
M. Dudley
M. B. Lee
Affiliation:
Grumman Corporate Research Center, Bethpage, NY 11714
T. Fanning
Affiliation:
Dept. of Materials Science & Engineering, SUNY at Stony Brook, NY 11794.
D. Di Marzio
Affiliation:
Grumman Corporate Research Center, Bethpage, NY 11714
L. G. Casagrande
Affiliation:
Grumman Corporate Research Center, Bethpage, NY 11714
M. Dudley
Affiliation:
Dept. of Materials Science & Engineering, SUNY at Stony Brook, NY 11794.
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Abstract

A detailed optimization of MBE growth of CdTe on CdTe (111)β using white beam synchrotron x-ray topography, and x-ray rocking curve analysis has been carried out. Defect structures in (111)5 substrates and epilayers are imaged with white beam topography and, for the first time, direct observation of stress induced microtwin growth in CdTe epilayers has been made. X-ray rocking curve analysis of CdTe substrates is shown to be relatively insensitive to defect structures consisting of dislocations and inclusions. On the other hand rocking curve analysis of (111) epilayers reveals a sensitivity to the presence of microtwin. The defect microstructure of a CdTe (111)Bepilayer with the narrowest rocking curve FWHM value published to date (9.4 arc-sec) will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 262: Symposium E – Defect Engineering in Semiconductor Growth, Processing and Device Technology , 1992 , 169
Copyright
Copyright © Materials Research Society 1992

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References

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