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Optically Actuated Deformable Micro-Mirrors for Adaptive Optics

Published online by Cambridge University Press:  01 February 2011

Troy Ribaudo ,
Jin Li ,
Bahareh Haji-saeed ,
Jed Khoury  and
William Goodhue
Troy Ribaudo
Affiliation:
[email protected], University of Massachusetts at Lowell, Physics, 1 University ave, Lowell, MA, 01854, United States
Jin Li
Affiliation:
[email protected], University of Massachusetts at Lowell, Physics, 1 University ave, Lowell, MA, 01854, United States
Bahareh Haji-saeed
Affiliation:
[email protected], 2 Solid State Scientific Corporation, Hollis, NH, 03049, United States
Jed Khoury
Affiliation:
[email protected], Air Force Research Laboratory, Hanscom AFB, MA, 01731, United States
William Goodhue
Affiliation:
[email protected], University of Massachusetts at Lowell, Physics, 1 University ave, Lowell, MA, 01854, United States
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Abstract

In this paper we report on our latest efforts to fabricate and characterize optically actuated deformable micro mirrors for wavefront correction in an adaptive optics system. The optically actuated DMM device consists of a Silicon Nitride (Si3N4) thin film patterned into a spring plate array, an SU-8 photoresist supporting structure that provides the space through which the mirror is allowed to deform, and a PIN photodiode which allows an optical control signal to actuate the DMM.

Keywords

microelectro-mechanical (MEMS)opticaldevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD06-14
Copyright
Copyright © Materials Research Society 2008

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References

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