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Optical Studies of Microstructure in a-Si:H

Published online by Cambridge University Press:  25 February 2011

M. Vaněček ,
D. Červinka ,
M. Favre ,
H. Curtins  and
A. V. Shah
M. Vaněček
Affiliation:
Institute of Physics, Czechoslovak Academy of Sciences, Na Slovance 2, CS-180 40 Praha, Czechoslovakia
D. Červinka
Affiliation:
Institute of Physics, Czechoslovak Academy of Sciences, Na Slovance 2, CS-180 40 Praha, Czechoslovakia
M. Favre
Affiliation:
Institute of Microtechnology, Breguet 2, CH-2000 Neuchâtel, Switzerland
H. Curtins
Affiliation:
Institute of Microtechnology, Breguet 2, CH-2000 Neuchâtel, Switzerland
A. V. Shah
Affiliation:
Institute of Microtechnology, Breguet 2, CH-2000 Neuchâtel, Switzerland
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Abstract

A set of samples grown under different substrate temperature has been characterised by complex optical, photoelectrical and transport measurements. A very sensitive and simple method for detection of optical scattering in a device quality amorphous silicon has been demonstrated. The spectral dependence of the optical scattering coefficient αs(E) can give us information on the nature and concentration of the scattering centers in a-Si:H thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 192: Symposium O – Amorphous Silicon Technology - 1990 , 1990 , 639
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

Knights, J.C. in “The Physics of Hydrogenated Amorphous Silicon I” ed. Joannopoulos, J.D. and Lucovsky, G., Springier-Verlag, Berlin 1984, p. 5 Google Scholar
Reimer, J.A. and Petrich, M. A. in “Amorpous silicon and related materials”, ed. Fritzsche, H., World Scientific Singapore 1989, p.3 Google Scholar
[3] Mahan, A.H., Williamson, D.L., Nelson, B.P. and Crandall, R.S., Phys. Rev. B40 (1989) 12024 Google Scholar
[4] Favre, M., Curtins, H. and Vaněček, M., J. Non-Crystal. Solids 114 (1989) 405 Google Scholar
[5] Vaněček, M., Kočka, J., Stuchlik, J., Kožlšek, Z., Štika, O. and Třiska, A., Solar Energy Mat. 8 (1983) 411 Google Scholar
[6] Curtins, H., Wyrsch, N., Favre, M. and Shah, A.V., Plasma chem. and Plasma proc. 7, (1987), 267 Google Scholar
[7] Ziegler, Y., Curtins, H., Baumann, J. and Shah, A.V.. Mat. Rec. Soc. Symp. Proc. 149, (1989), 81 Google Scholar
[8] Filinski, I., Phys. Stat. Sol. (b) 49 (1972) 577 Google Scholar
[9] Ditchburn, R. W., “Light”, Blachie and Son, London 1963, second edition, p. 582 Google Scholar