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Optical Monitoring of Y-Ba-Cu-O Ion Beam Sputtering

Published online by Cambridge University Press:  26 February 2011

J.D. Klein  and
A. Yen
J.D. Klein
Affiliation:
EIC Laboratories, Norwood, MA 02062
A. Yen
Affiliation:
EIC Laboratories, Norwood, MA 02062
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Abstract

Emission spectra resulting from ion beam sputtering an Y-Ba-Cu-O target were observed as a function of beam voltage and time using an optical multichannel analyser. The observed spectra were clean with several peaks attributed to each of Y, Ba, and Ar. A well defined O peak and a weak CuO peak were available for comparison. The intensities of the cation peaks were linear with respect to beam voltage above 450 V. Presputtering of a previously stored target was characterized by the diminishment of an initially large H peak as the cation peaks emerged.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 593
Copyright
Copyright © Materials Research Society 1991

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